Cleanrooms and associated controlled environments
• ISO 14644-1:2015
Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration
• ISO 14644-2:2015
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
• ISO 14644-3:2019
Cleanrooms and associated controlled environments — Part 3: Test methods
• ISO 14644-4:2001
Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
• ISO/CD 14644-4.2
Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
• ISO 14644-5:2004
Cleanrooms and associated controlled environments — Part 5: Operations
• ISO 14644-7:2004
Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
• ISO 14644-8:2013
Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC)
• ISO/DIS 14644-8
Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC)
• ISO 14644-9:2012
Cleanrooms and associated controlled environments — Part 9: Classification of surface cleanliness by particle concentration
• ISO/DIS 14644-9
Cleanrooms and associated controlled environments — Part 9: Classification of surface cleanliness by particle concentration
• ISO 14644-10:2013
Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
• ISO/DIS 14644-10
Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
• ISO 14644-12:2018
Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
• ISO 14644-13:2017
Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
• ISO 14644-14:2016
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
• ISO 14644-15:2017
Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
• ISO 14644-16:2019
Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices
• ISO 14644-17:2021
Cleanrooms and associated controlled environments — Part 17: Particle deposition rate applications
• ISO 14698-1:2003
Cleanrooms and associated controlled environments — Biocontamination control — Part 1: General principles and methods
• ISO 14698-2:2003
Cleanrooms and associated controlled environments — Biocontamination control — Part 2: Evaluation and interpretation of biocontamination data
• ISO 14698-2:2003/COR 1:2004
Cleanrooms and associated controlled environments — Biocontamination control — Part 2: Evaluation and interpretation of biocontamination data — Technical Corrigendum 1
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